Laser-operated light source

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United States of America Patent

PATENT NO 9678262
APP PUB NO 20150085517A1
SERIAL NO

14491079

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Abstract

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A laser-operated light source encompasses a chamber for accommodating an ionizable gas and an ignition source for ionizing the gas in the chamber for generating a plasma. The light source encompasses a laser for inputting laser energy into the plasma such that, under the impact of the laser radiation, the plasma emits useful light, which forms the output signal of the light source, wherein provision is made for means for coupling the useful light into a transferring optical fiber. An optical system for imaging the plasma onto the end of the optical fiber, which faces the optical system, is arranged between the chamber and the transferring optical fiber, wherein the optical system is corrected for reducing the chromatic aberration.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Frerking, Dieter Gladebeck, DE 4 19
Görtz, Björn Göttingen, DE 1 8
Spruch, Claus Göttingen, DE 4 19
Thöniβ, Thomas Göttingen, DE 1 8

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