Automatic tuning of atomic force microscope
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United States of America Patent
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Jun 13, 2017
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app pub date -
Oct 28, 2011
filing date -
Oct 28, 2011
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Abstract
An atomic force microscope (AFM) comprises a physical system and a controller comprising a plurality of digital filters and configured to control the physical system. The AFM is tuned by performing automatic loop shaping on a loop response defined by a frequency response of the physical system and a frequency response of the controller, and adjusting a gain of the controller according to a peak in a magnitude of the loop response.
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