Contact force sensor

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United States of America Patent

PATENT NO 9677955
SERIAL NO

14648260

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Provided is a contact force sensor of high sensitivity and high accuracy. This contact force sensor is fabricated by machining of a silicon semiconductor material. The contact force sensor is provided with a sensor configuration having a base part, and a contact force transmission part formed in a direction orthogonal to this base part. A stress-electricity conversion element for converting displacement of the contact force transmission part to an electrical signal, formed in the base part of the sensor configuration, is also provided.

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Patent Owner(s)

Patent OwnerAddress
SEMITEC CORPORATION7-7 KINSHI 1-CHOME SUMIDA-KU TOKYO 130-8512

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Inamura, Shuji Tokyo, JP 2 13
Matsudate, Tadashi Tokyo, JP 6 45

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