MEMS device with micromachined thermistor

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United States of America Patent

PATENT NO 9677948
SERIAL NO

14681848

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Abstract

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A micromachined apparatus includes micromachined thermistor having first and second ends physically and thermally coupled to a substrate via first and second anchor structures to enable a temperature-dependent resistance of the micromachined thermistor to vary according to a time-varying temperature of the substrate. The micromachined thermistor has a length, from the first end to the second end, greater than a linear distance between the first and second anchor structures.

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Patent Owner(s)

Patent OwnerAddress
SITIME CORPORATION5451 PATRICK HENRY DRIVE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arft, Carl Sunnyvale, US 8 27
Hagelin, Paul M Saratoga, US 72 552
Partridge, Aaron Cupertino, US 151 2545

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