Substrate support with quadrants
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United States of America Patent
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Jun 13, 2017
Issued Date -
N/A
app pub date -
Oct 2, 2014
filing date -
Oct 24, 2013
priority date (Note) -
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Abstract
The present invention generally relates to a substrate support for use in a processing chamber. The substrate support is divided into quadrants with each quadrant capable of heating independent of the other quadrants. The independent heating permits the substrate support to provide different heating to either different substrate simultaneously disposed on the substrate support or to different areas of a common substrate. Thus, the substrate heating may be tailored to ensure desired processing of the substrate or substrates occurs.
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