2DEG-based sensor and device for ECG sensing

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United States of America Patent

PATENT NO 9675262
SERIAL NO

14265088

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Abstract

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The disclosed technology generally relates to sensors comprising a two-dimensional electron gas (2DEG), and more particularly to an AlGaN/GaN 2DEG-based sensor for sensing signals associated with electrocardiograms, and methods of using the same. In one aspect, a sensor comprises a substrate and a GaN/AlGaN hetero-junction structure formed on the substrate and configured to form a two-dimensional electron gas (2DEG) channel within the GaN/AlGaN hetero-junction structure. The sensor additionally comprises Ohmic contacts connected to electrical metallizations and to the 2DEG channel, wherein the GaN/AlGaN hetero-junction structure has a recess formed between the Ohmic contacts. The sensor further comprises a dielectric layer formed on a top surface of the sensor.

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Patent Owner(s)

Patent OwnerAddress
STICHTING IMEC NEDERLANDHIGH TECH CAMPUS 31 EINDHOVEN 5656 AE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Offermans, Peter Eindhoven, NL 16 81
Vitushinsky, Roman Vaals, NL 5 26

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