Ultra dense and ultra low power microhotplates using silica aerogel and method of making the same

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United States of America Patent

PATENT NO 9674896
APP PUB NO 20150201463A1
SERIAL NO

14470328

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Abstract

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An ultra dense and ultra low power microhotplates using silica aerogel and method of making the same, comprising spin coating an aerogel layer followed by SiO2 as capping interlayer, and Nichrome (Ni80/Cr20) for heating element to increase the efficiency of metal oxide gas sensors. There may be multiple thin layers of aerogel separated by interlayers such as of SiO2.

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Patent Owner(s)

Patent OwnerAddress
THE UNIVERSITY OF LOUISIANA AT LAFAYETTEP O BOX 43610 LAFAYETTE LA 70504-3610

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Madani, Mohammad Reza Lafayette, US 4 34
Seyedjalaliaghdam, Seyedmohammad Lafayette, US 3 10

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