Method for processing a semiconductor substrate and a method for processing a semiconductor wafer

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United States of America Patent

PATENT NO 9673096
APP PUB NO 20160141208A1
SERIAL NO

14541239

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Abstract

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According to various embodiments, a method for processing a semiconductor substrate may include: covering a plurality of die regions of the semiconductor substrate with a metal; forming a plurality of dies from the semiconductor substrate, wherein each die of the plurality of dies is covered with the metal; and, subsequently, annealing the metal covering at least one die of the plurality of dies.

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Patent Owner(s)

Patent OwnerAddress
INFINEON TECHNOLOGIES AGGERMAN LAURA KAN ANG 1-12 PYRENE EBY BERG CITY NO NEUBIBERG BAVARIA

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Heinrici, Markus Juch Viktring, AT 1 15
Hirschler, Joachim Villach, AT 19 109
Mischitz, Martin Wernberg, AT 23 81
Roesner, Michael Villach, AT 33 151
Stranzl, Gudrun Goedersdorf, AT 29 125
Zgaga, Martin Rosegg, AT 17 101

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