Cholate photoacid generators and photoresists comprising same

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United States of America Patent

PATENT NO 9671689
SERIAL NO

12965339

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Abstract

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New photoacid generator compounds (“PAGs”) are provided that comprise a cholate moiety and photoresist compositions that comprise such PAG compounds.

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Patent Owner(s)

Patent OwnerAddress
DUPONT ELECTRONIC MATERIALS INTERNATIONAL LLC455 FOREST STREET MARLBOROUGH MA 01752

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aqad, Emad Northborough, US 70 229
Li, Mingqi Shrewsbury, US 105 434
Mattia, Joseph Framingham, US 8 32
Xu, Cheng-Bai Southborough, US 81 642

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