Sensor structure for sensing pressure waves and ambient pressure
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United States of America Patent
Stats
-
Jun 6, 2017
Grant Date -
Jul 14, 2016
app pub date -
Mar 23, 2016
filing date -
Mar 6, 2014
priority date (Note) -
In Force
status (Latency Note)
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Abstract
In various embodiments, a sensor structure is provided. The sensor structure may include a first conductive layer; an electrode element; and a second conductive layer arranged on an opposite side of the electrode element from the first conductive layer. The first conductive layer and the second conductive layer may form a chamber. The pressure in the chamber may be lower than the pressure outside of the chamber.
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International Classification(s)
- 2016 Application Filing Year
- G01L Class
- 1354 Applications Filed
- 1037 Patents Issued To-Date
- 76.59 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- G01L Class
- 20.58 % this patent is cited more than
- 8 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Dec 6, 2024 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 6, 2028 |
