Charged particle beam device, system for a charged particle beam device, and method for operating a charged particle beam device

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United States of America Patent

PATENT NO 9666406
SERIAL NO

15047007

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Abstract

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The present disclosure provides a charged particle beam device. The charged particle beam device includes an emitter arrangement configured to generate a primary charged particle beam having two or more primary charged particle sub-beams, a sample stage for supporting a sample, an objective lens for focusing the two or more primary charged particle sub-beams onto the sample, and a primary charged particle optics. The primary charged particle optics includes a coil provided between the emitter arrangement and the objective lens. The coil is configured to generate a magnetic field having a magnetic field component parallel to a longitudinal axis of the coil, wherein the magnetic field acts on the two or more primary charged particle sub-beams propagating along the longitudinal axis, and wherein an aspect ratio of the coil is at least 1. A controller is configured to adjust the magnetic field of the coil such that a first primary charged particle sub-beam of the two or more primary charged particle sub-beams is directed towards a first spot on the sample and a second primary charged particle sub-beam of the two or more primary charged particle sub-beams is directed towards a second spot on the sample, wherein the first spot and the second spot are spaced apart from each other.

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Patent Owner(s)

Patent OwnerAddress
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUR HALBLEITERPRUFTECHNIK MBHGERMAN HIMES TWEETEN HEIMSTETTEN BAVARIA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cook, Benjamin John München, DE 19 121
Firnkes, Matthias Walpertskirchen, DE 15 34
Lanio, Stefan Erding, DE 49 438

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