System for imaging a signal charged particle beam, method for imaging a signal charged particle beam, and charged particle beam device

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United States of America Patent

PATENT NO 9666405
SERIAL NO

15046905

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Abstract

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The present disclosure provides a system for imaging a signal charged particle beam emanating from a sample by impingement of a primary charged particle beam. The system includes a detector arrangement having a first detection element for detecting a first signal charged particle sub-beam of the signal charged particle beam originating from a first spot on the sample and a second detection element for detecting a second signal charged particle sub-beam of the signal charged particle beam originating from a second spot on the sample, wherein the first detection element and the second detection element are separated from each other, and signal charged particle optics. The signal charged particle optics includes a coil configured to generate a magnetic field having a magnetic field component parallel to a longitudinal axis of the coil, wherein the magnetic field acts on the first signal charged particle sub-beam and the second signal charged particle sub-beam propagating along the longitudinal axis, and wherein an aspect ratio of the coil is at least 1, and a controller configured to adjust the magnetic field of the coil such that the first signal charged particle sub-beam is directed towards the first detection element and the second signal charged particle sub-beam is directed towards the second detection element.

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Patent Owner(s)

Patent OwnerAddress
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUR HALBLEITERPRUFTECHNIK MBHGERMAN HIMES TWEETEN HEIMSTETTEN BAVARIA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cook, Benjamin John München, DE 19 121
Firnkes, Matthias Walpertskirchen, DE 15 34
Frosien, Jürgen Riemerling, DE 34 328
Lanio, Stefan Erding, DE 49 438

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