Onium salt compound, resist composition, and pattern forming process
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United States of America Patent
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May 30, 2017
Grant Date -
May 12, 2016
app pub date -
Nov 3, 2015
filing date -
Nov 7, 2014
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Abstract
Sulfonium and iodonium salts of a carboxylate having an aromatic ring to which a nitrogen-containing alkyl or cyclic structure is attached are novel. The onium salt functions as an acid diffusion controlling agent in a resist composition, enabling to form a pattern of good profile with high resolution, improved MEF, LWR and DOF.
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