Group 5 metal oxo-alkoxo complex, method for producing same, and method for manufacturing group 5 metal oxide film

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United States of America Patent

PATENT NO 9663541
APP PUB NO 20150353588A1
SERIAL NO

14758142

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Abstract

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A compound useful for the manufacture of a Group 5 metal oxide film is provided. The compound is a Group 5 metal oxo-alkoxo complex represented by the following formula (A), and after preparing a film-forming material solution containing the compound and an organic solvent, a Group 5 metal oxide film can be manufactured using the film-forming material solution:

description='In-line Formulae' end='lead'Mα4-O)β3-O)γ(μ-O)δ(μ-ORA)(ORA)ζ(RAOH)ηXθYι  (A)description='In-line Formulae' end='tail'

(wherein M represents a niobium atom, etc.; RA represents an alkyl group; X represents an alkylenedioxy group; Y represents a carboxy group, etc.; α represents an integer of 3 to 10; β represents 0 or 1; γ represents an integer of 0 to 8; δ represents an integer of 2 to 9; ∈ represents an integer of 0 to 6; ζ represents an integer of 6 to 16; η represents an integer of 0 to 4; θ represents an integer of 0 to 2; and ι represents an integer of 0 to 6).

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Patent Owner(s)

Patent OwnerAddress
TOSOH CORPORATIONYAMAGUCHI 746-8501
SAGAMI CHEMICAL RESEARCH INSTITUTE2743-1 HAYAKAWA AYASE-SHI KANAGAWA 252-1193

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Asano, Sachio Kanagawa, JP 2 1
Hara, Daiji Kanagawa, JP 13 112
Hara, Yasushi Kanagawa, JP 102 985
Kinoshita, Tomoyuki Kanagawa, JP 19 203
Tada, Ken-ichi Kanagawa, JP 17 486
Tanaka, Ryoji Kanagawa, JP 44 198

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