Ultrasonic cleaning method

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United States of America Patent

PATENT NO 9662687
APP PUB NO 20160052025A1
SERIAL NO

14930777

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Abstract

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A cleaning method involves: disposing in a cleaning liquid held in a cleaning tank an object to be cleaned; and ultrasonically vibrating the cleaning liquid via an intermediate medium in contact with the cleaning tank to clean said object, the ultrasonically vibrating involving: ultrasonically vibrating the cleaning liquid with the cleaning liquid and the intermediate medium allowing sonic velocities, respectively, having a first difference; and ultrasonically vibrating the cleaning liquid with the cleaning liquid and the intermediate medium allowing sonic velocities, respectively, having a second difference different from the first difference.

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Patent Owner(s)

Patent OwnerAddress
SILTRONIC AGEINSTEINSTR 172 TOWER B / BLUE TOWER 81677 MÜNCHEN 81677

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Haibara, Teruo Hikari, JP 50 136
Kubo, Etsuko Hikari, JP 11 23
Mori, Yoshihiro Shunan, JP 193 5414
Uchibe, Masashi Hikari, JP 11 23

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