Radiation generator adjusting beam focusing based upon a diagnostic electrode
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United States of America Patent
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May 23, 2017
Grant Date -
Jun 25, 2015
app pub date -
Dec 17, 2014
filing date -
Dec 23, 2013
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Abstract
A radiation generator is provided that includes a target, a cathode to emit electrons in a downstream direction toward the target, a first conductive member downstream of the cathode, and a second conductive member downstream of the cathode. The first and second conductive members have a potential difference with the cathode such that a resultant electric field accelerates the electrons toward the target. A diagnostic current in the second conductive member and a target current in the target may be measured, and an electrical property of the first conductive member may be adjusted based upon the diagnostic current and the target current.
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