Method of studying a sample in an ETEM

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United States of America Patent

PATENT NO 9658246
APP PUB NO 20130040400A1
SERIAL NO

13566834

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Abstract

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A method and apparatus is provided for studying the reaction (chemical or physical) of a sample with a gas in the active atmosphere of an instrument such as an Environmental Transmission Electron Microscope (ETEM), optical microscope, X-ray microscope or scanning probe microscope. The sample is exposed to inert gas at a desired temperature before exchanging the inert gas to the active gas to reduce to avoid, or at least minimize, sample drift during image acquisition.

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Patent Owner(s)

Patent OwnerAddress
FEI COMPANYHILLSBORO OR

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Konings, Stan Johan Pieter Breda, NL 5 11
Kujawa, Stephan Veldhoven, NL 5 29
Trompenaars, Petrus Hubertus Franciscus Tilburg, NL 10 37

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