X-ray topography apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 23, 2017
Grant Date -
May 28, 2015
app pub date -
Nov 12, 2014
filing date -
Nov 28, 2013
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Disclosed is an X-ray topography apparatus including an X-ray source, a multilayer film mirror, a slit, a two-dimensional X-ray detector, and a sample moving device that sequentially moves the sample to a plurality of step positions. The X-ray source is a minute focal spot. The multilayer film mirror forms monochromatic, collimated, high-intensity X-rays. The direction in which the multilayer film mirror collimates the X-rays coincides with the width direction of the slit. The step size by which the sample is moved is smaller than the width of the slit. The combination of the size of the minute focal spot, the width of the slit, and the intensity of the X-rays that exit out of the multilayer film mirror allows the contrast of an X-ray image produced when the detector receives X-rays for a predetermined period of 1 minute or shorter to be high enough for observation of the X-ray image.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2014 Application Filing Year
- G21K Class
- 330 Applications Filed
- 266 Patents Issued To-Date
- 80.61 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 9 Citation Count
- G21K Class
- 17.50 % this patent is cited more than
- 8 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Nov 23, 2024 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Nov 23, 2028 |
