Device for measuring point diffraction interferometric wavefront aberration and method for detecting wave aberration
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United States of America Patent
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May 23, 2017
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Dec 31, 2015
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Dec 24, 2015
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Abstract
A device for measuring point diffraction interferometric wavefront aberration having an optical source, an optical splitter, a first light intensity and polarization regulator, a phase shifter, a second light intensity and polarization regulator, an ideal wavefront generator, an object precision adjusting stage, a measured optical system, an image wavefront detection unit, an image precision adjusting stage, and a data processing unit. A method for detecting wavefront aberration of the optical system by using the device is also disclosed.
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