Process for the preparation of trisilylamine from monochlorosilane and ammonia

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United States of America Patent

PATENT NO 9656869
APP PUB NO 20140161705A1
SERIAL NO

14131126

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Abstract

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The present invention relates to a specific process for producing trisilylamine from monochlorosilane and ammonia in the liquid phase. The invention further relates to a plant in which such a process can be carried out with advantage.

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Patent Owner(s)

Patent OwnerAddress
EVONIK OPERATIONS GMBHRELLINGHAUSER STRASSE 1-11 ESSEN 45128

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goetz, Christian Seligenstadt, DE 16 55
Hoppe, Carl-Friedrich Gruendau, DE 10 34
Lunt-Rieg, Ingrid Bad Homburg, DE 9 44
Rauleder, Hartwig Rheinfelden, DE 105 730

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