MEMS microphone with dual-back plate and method of manufacturing the same
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United States of America Patent
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May 23, 2017
Grant Date -
May 14, 2015
app pub date -
Nov 29, 2012
filing date -
May 9, 2012
priority date (Note) -
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Abstract
Disclosed herein are a microelectromechanical systems (MEMS) microphone with a dual-back plate, and a method of manufacturing the same. The MEMS microphone according to an exemplary embodiment of the present invention includes: a substrate having a first back plate formed at a central portion thereof; a membrane plate disposed on first support parts formed at both sides on the substrate and vibrated depending on external sound pressure; and a second back plate disposed on second support parts formed at both sides of the membrane plate.
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