Gas laser apparatus for determining composition ratio of laser gas
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United States of America Patent
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May 16, 2017
Grant Date -
Aug 4, 2016
app pub date -
Jan 27, 2016
filing date -
Jan 29, 2015
priority date (Note) -
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Abstract
A gas laser apparatus includes an actual laser output acquiring unit that acquires a first actual laser output at a predetermined laser output command after passage of a predetermined time from issuing of a first laser gas pressure command and acquires a second actual laser output at the predetermined laser output command after passage of the predetermined time from issuing of a second laser gas pressure command smaller than the first laser gas pressure command and a determining unit that determines whether the composition ratio of a laser gas in a gas container is normal or not by comparing the first actual laser output with a first reference output and comparing the second actual laser output with a second reference output smaller than the first reference output.
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