Acceleration sensor structure and use thereof

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United States of America Patent

PATENT NO 9651574
APP PUB NO 20160041194A1
SERIAL NO

14920566

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Abstract

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A MEMS-sensor structure comprising first means and second means coupled for double differential detection and positioned symmetrically to provide quantities for the double differential detection in a phase shift. If the sensor deforms, due to a specifically symmetric positioning of the first and second means, the effect of the displacement is at least partly eliminated.

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Patent Owner(s)

Patent OwnerAddress
MURATA MANUFACTURING CO LTDKYOTO JAPAN KYOTO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Blomqvist, Anssi Helsinki, FI 52 404
Roschier, Leif Vantaa, FI 7 51
Rytkönen, Ville-Pekka Klaukkala, FI 36 120

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