Sheet-shaped mold position detection device, transfer device and transfer method

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United States of America Patent

PATENT NO 9649787
SERIAL NO

13583191

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Abstract

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A sheet-shaped mold position detection device 183 for conveying and positioning a sheet-shaped mold M on which a fine transfer pattern M1 is formed. The sheet-shaped mold position dejection device 183 includes a sheet-shaped mold position detector 191 that detects a predetermined region of the sheet-shaped mold M by detecting transmittance of light in the sheet-shaped mold M.

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Patent Owner(s)

Patent OwnerAddress
TOSHIBA KIKAI KABUSHIKI KAISHA2-2 UCHISAIWAICHO 2-CHOME CHIYODA-KU TOKYO 100-8503

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baba, Takato Numazu, JP 13 57
Itani, Shinya Mishima, JP 17 81
Kitahara, Hidetoshi Atami, JP 11 54
Nishihara, Hiromi Fuji, JP 8 92
Ookawa, Takafumi Mishima, JP 10 119
Tashiro, Takaharu Gotemba, JP 16 131

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