Parameter setting method and parameter setting apparatus for positioning apparatus, and positioning apparatus provided with the parameter setting apparatus
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United States of America Patent
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May 9, 2017
Grant Date -
Oct 6, 2016
app pub date -
Mar 30, 2016
filing date -
Mar 31, 2015
priority date (Note) -
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Abstract
A parameter setting apparatus includes a calculator calculating a first resonance frequency ωr1 of a structure composed of a table, a rotor of a drive motor, and an object and a second resonance frequency ωr2 of a structure composed of a stator of the drive motor and a base using equations given below, and a setter setting a frequency band to be removed for a first damping filter based on the calculated first resonance frequency ωr1 and setting a frequency band to be removed for a second damping filter based on the second resonance frequency ωr2.
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