Measurement apparatus and method with adaptive scan rate
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United States of America Patent
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May 9, 2017
Grant Date -
Dec 8, 2016
app pub date -
Aug 31, 2015
filing date -
Jun 2, 2015
priority date (Note) -
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Abstract
A measurement method in which a sensing unit acquires surface data of a measurement target while scanning the surface of the measurement target and at least one of the sensing unit and the measurement target is moved in order for the sensing unit to scan the surface along a plurality of fast scan lines on the surface of the measurement target, includes: a first step in which the sensing unit scans a surface along any one fast scan line of the plurality of fast scan lines to acquire the surface data along the any one fast scan line; and a second step in which the sensing unit acquires a surface data along a fast scan line most adjacent to the any one fast scan line while at least one of the sensing unit and the measurement target is moved along the most adjacent fast scan line, after the first step.
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