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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
PARK SYSTEMS CORP	KANC 4TH FLOOR 109 GWANGGYO-RO YEONGTONG-GU SUWON-SI GYEONGGI-DO 16229

International Classification(s)

• B82Y:SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; ....
• G01Q:SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIO....

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• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Ahn, Byoung Woon	Anyang-si, KR	1	0
Chung, Sang Han	Seoul, KR	7	9
Kim, Dongryul	Gwangmyeong-si, KR	1	0
Park, Sang-il	Seongnam-si, KR	220	5653

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
7.5 Year Payment	$3600.00	$1800.00	$900.00	Nov 9, 2024
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Nov 9, 2028

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
May 09, 2017	US,9645168,B2   US9645168B2	GRANTED PATENT AS SECOND PUBLICATION
June 30, 2016	US,20160187373,A1   US20160187373A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 9645168

Head limiting movement range of laser spot and atomic force microscope having the same

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