Adsorption characteristic measuring apparatus
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United States of America Patent
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May 9, 2017
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N/A
app pub date -
Sep 14, 2015
filing date -
Sep 16, 2014
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Abstract
An adsorption characteristic measuring apparatus according to the invention supplies a predetermined adsorption gas to a film formed body as a sample accommodated in a sample tube to measure adsorption characteristics. In the inside of the sample tube, a void between an inner wall surface of the sample tube and the sample is filled with a particle-like filler having higher thermal conductivity than the adsorption gas under a measurement pressure. In addition, a glass rod as a dead volume reducing rod, a spacer ring for forming a thermal insulation space between the particle-like filler and the glass rod, and a reflective plate for reflecting radiant heat are disposed.
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