Pressure-sensitive sensor

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United States of America Patent

PATENT NO 9645032
SERIAL NO

14655831

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Abstract

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The present invention achieves a pressure-sensitive sensor which can detect information on a pressure, a sound pressure, acceleration, gas and the like, with high sensitivity. The pressure-sensitive sensor includes: a cantilever (22); a frame (23) which is provided around the cantilever (22) and holds a base end of the cantilever (22); a gap (24) formed between the cantilever (22) and the frame (23); and a liquid (28) which seals the gap (24).

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Patent Owner(s)

Patent OwnerAddress
THE UNIVERSITY OF TOKYOTOKYO JAPAN TOKYO METROPOLIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Matsumoto, Kiyoshi Tokyo, JP 83 1242
Nguyen, Binh-Khiem Tokyo, JP 1 19
Nguyen, Minh-Dung Tokyo, JP 6 48
Phan, Hoang-Phuong Tokyo, JP 1 19
Shimoyama, Isao Tokyo, JP 35 210

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