Thermal bridge for chemical vapor deposition reactors
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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May 9, 2017
Issued Date -
N/A
app pub date -
Aug 31, 2011
filing date -
Aug 31, 2011
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A thermal bridge connecting first and second processing zones and a method for transferring a work piece from a first to a second processing zone by way of the thermal bridge are disclosed. A work piece, transportable from the first to the second processing zone on or above the thermal bridge, is maintained at a temperature between the temperatures of the processing zones. The thermal bridge member features a thermally conductive transport member for the work piece supported over an infrared transmissive member that is insulative to heat conduction and convection. The bridge insulative member extends between the first and second processing zones or between reactors. An infrared radiation beam source emits infrared radiation which passes through the bridge insulative member to the transport member, heating the member. In an alternate embodiment, the transport member may be heated directly. A liner member may be mounted above the bridge member to retain heat.
First Claim
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International Classification(s)
- 2011 Application Filing Year
- C23C Class
- 1852 Applications Filed
- 1328 Patents Issued To-Date
- 71.71 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- C23C Class
- 0 % this patent is cited more than
- 8 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Nov 9, 2024 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Nov 9, 2028 |
