Method for producing a pressure sensor and corresponding sensor

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United States of America Patent

PATENT NO 9643836
APP PUB NO 20150033878A1
SERIAL NO

14383092

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention relates to a method for producing a pressure sensor, comprising the following steps: assembling a support substrate with a deformable membrane on which strain gauges have been deposited, wherein the deformable membrane comprises a thinned area at the center thereof, the support substrate is disposed on top of the deformable membrane, the support substrate comprises an upper surface and a lower surface in contact with the deformable membrane, and the support substrate also comprises lateral recesses arranged on top of the strain gauges and a central recess arranged on top of the thinned area of the membrane, so as to obtain a micromechanical structure; and, once the assembly has been obtained, depositing, in a single step, at least one conductive material on the upper surface of the support and in the lateral recesses of the support, said conductive material extending into the recesses in order to be in contact with the strain gauges so as to form electrical contacts in contact with the strain gauges.

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Patent Owner(s)

Patent OwnerAddress
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)75016 PARIS
AUXITROL S A18000 BOURGES

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brida, Sebastiano Salles sur l'Hers, FR 5 86
Le, Neal Jean-Francois Neuchatel, CH 4 7

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