Method and apparatus for curing thin films on low-temperature substrates at high speeds
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United States of America Patent
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May 9, 2017
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app pub date -
Jun 29, 2015
filing date -
Jul 9, 2008
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Abstract
A curing apparatus for thermally processing thin films on low-temperature substrates at high speeds is disclosed. The curing apparatus includes a strobe head, a strobe control module and a conveyor control module. The strobe control module controls the power, duration and repetition rate of a set of pulses generated by a flash lamp on the strobe head. The conveyor control module along with the strobe control module provide real-time synchronization between the repetition rate of the set of pulses and the speed at which the substrate is being moved under the strobe head, according to the speed information.
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