Low-oxygen atmosphere apparatus
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United States of America Patent
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May 2, 2017
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app pub date -
May 28, 2013
filing date -
Jun 4, 2012
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Abstract
A low-oxygen atmosphere apparatus including a chamber which houses an object to be processed, microwave generators, and waveguides through which a microwave generated in the microwave generators is transmitted, and further including, in the chamber and/or the waveguides, oxygen-reducing materials to lower the oxygen concentration of the atmosphere in the chamber, which generates heat by the microwave in order to accelerate a reducing reaction of oxygen, thereby lowering the oxygen concentration of the atmosphere in the chamber.
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