Process for plasma treatment employing ceramic-filled polymer composite parts

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United States of America Patent

PATENT NO 9640381
APP PUB NO 20150041433A1
SERIAL NO

14111086

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Abstract

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Internal components of plasma reactors are composed of a toleratable, ceramic filled plasma-useful polymer such as a high temperature engineering thermoplastic, preferably a polyamideimide or polybenzimidazole. The parts exhibit a low erosion rate upon exposure to plasma at low pressure.

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Patent Owner(s)

Patent OwnerAddress
QUADRANT EPP AG5600 LENZBURG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Campbell, Richard William Reinholds, US 3 2
Glander, Stephan Wettswil, CH 14 76
Williams, Scott Howard Pleasanton, US 2 1

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