Charged particle beam system and method of operating a charged particle beam system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 2, 2017
Grant Date -
Apr 14, 2016
app pub date -
Dec 15, 2015
filing date -
Jul 8, 2013
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10−5 per incident neon ion.
First Claim
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International Classification(s)
- 2015 Application Filing Year
- H01J Class
- 2290 Applications Filed
- 1843 Patents Issued To-Date
- 80.49 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- H01J Class
- 25.25 % this patent is cited more than
- 8 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Nov 2, 2024 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Nov 2, 2028 |
