Stacked zone plates for pitch frequency multiplication

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United States of America Patent

PATENT NO 9640291
SERIAL NO

14068322

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Abstract

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A compound x-ray lens and method of fabricating these lenses are disclosed. These compound lenses use multiple zone plate stacking to achieve a pitch frequency increase for the resulting combined zone plate. The compound equivalent zone plate includes a first zone plate having an initial pitch frequency stacked onto a second zone plate to form an equivalent compound zone plate. The equivalent zone plate has a pitch frequency that is at least twice the initial pitch frequency. Also, in one example, the equivalent zone plate has a mark-to-space ratio of 1:1.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS X-RAY MICROSCOPY INC5300 CENTRAL PARKWAY DUBLIN CA 94568

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Feser, Michael Orinda, US 35 794
Lyon, Alan Francis Berkeley, US 16 662

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