Scan mirrors for laser radar

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United States of America Patent

PATENT NO 9638799
SERIAL NO

13840658

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Abstract

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Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.

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Patent Owner(s)

Patent OwnerAddress
NIKON METROLOGY NV3001 LEUVEN

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cooper, Alexander Belmont, US 34 583
Goodwin, Eric Peter Tucson, US 63 476
Hedges, Thomas M Haymarket, US 13 718
Rezk, Mina A Bristow, US 16 566
Slotwinski, Anthony R Reston, US 10 313
Smith, Daniel G Tucson, US 43 588

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