Probe card analysis system and method
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United States of America Patent
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May 2, 2017
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N/A
app pub date -
Jun 18, 2013
filing date -
Mar 14, 2003
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Abstract
A system and method for evaluating wafer test probe cards under real-world wafer test cell condition integrates wafer test cell components into the probe card inspection and analysis process. Disclosed embodiments may utilize existing and/or modified wafer test cell components such as, a head plate, a test head, a signal delivery system, and a manipulator to emulate wafer test cell dynamics during the probe card inspection and analysis process.
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