Multiple mode inspection system and method for evaluating a substrate by a multiple mode inspection system
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United States of America Patent
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May 2, 2017
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app pub date -
Jul 29, 2014
filing date -
Aug 8, 2013
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Abstract
A multiple mode evaluation system that includes a multiple mode imager that is arranged to perform a single scan of a substrate while alternating between different optical modes thereby producing different sets of images of areas of the substrate, each set of images being associated with a single optical mode of image acquisition; wherein the different optical modes differ from each other by at least one optical characteristic.
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