Automatic handling buffer for bare stocker
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United States of America Patent
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Apr 25, 2017
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N/A
app pub date -
Feb 5, 2008
filing date -
Feb 5, 2008
priority date (Note) -
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Abstract
A buffer station for automatic material handling system can provide throughput improvement. Further, by storing to-be-accessed workpieces in the buffer stations of an equipment, the operation of the facility is not interrupted when the equipment is down. The buffer station can be incorporated in a stocker, such as bare wafer stocker.
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