Elevator linear motor drive
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United States of America Patent
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Apr 25, 2017
Grant Date -
Dec 25, 2014
app pub date -
Sep 4, 2014
filing date -
Nov 12, 2007
priority date (Note) -
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Abstract
Disclosed is a substrate processing system with a magnetic conduit configuration to improve the movement of a substrate carrier within the system. The configuration specifically provides for safe, secure movement of a carrier between multiple levels of a substrate processing system by using magnetic conduits to redirect magnetic forces created by a linear motor, permitting the linear motor to be positioned outside of the system and in a location that will not interfere with the movement of the carrier.
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