Emitter for an electron beam, electron beam device and method for producing and operating an electron emitter
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United States of America Patent
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Apr 25, 2017
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app pub date -
Feb 10, 2016
filing date -
Feb 10, 2016
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Abstract
A cold field emitter for emitting an electron beam for an electron beam device is described. The emitter includes an emitter tip having a tip surface; and two or more adjacent facets formed at the tip surface and having facet boundaries, each of the facets forming a recess in the emitter tip, wherein the facets are separated. An intermediate area is provided between and around the two or more adjacent facets and the intermediate area is configured for electron emission. Further, an electron beam device, a method for operating an electron beam device and a method for producing an emitter for an electron beam device is described.
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