Self-heated MEMs based capacitance diaphragm gauge

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United States of America Patent

PATENT NO 9631993
APP PUB NO 20120197554A1
SERIAL NO

13316081

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Abstract

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The disclosed embodiments include a capacitance diaphragm gauge that includes a self-heated micro-electro-mechanical-system sensor for measuring pressure. The self-heated micro-electro-mechanical-system has at least one integrated heater component and at least one membrane on the self-heated micro-electro-mechanical-system.

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Patent Owner(s)

Patent OwnerAddress
BROOKS INSTRUMENT LLC407 WEST VINE STREET HATFIELD PA 19440

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Glaudel, Stephen P Lebanon, US 13 186
Tinsley, Ken Frisco, US 1 1

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