Partially insulated cathode
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United States of America Patent
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Apr 18, 2017
Grant Date -
Feb 11, 2016
app pub date -
Aug 11, 2014
filing date -
Aug 11, 2014
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Abstract
A partially-insulated cathode for exciting plasma in a plasma chamber is provided. The partially-insulated cathode includes a conductive structure enclosing a cavity having a cavity surface and an insulating material contiguously covering a portion of the cavity surface from the cavity opening up to an insulation height that is less than a cavity height. Cross-sections of the cavity in X-Y planes have at least one respective cavity-width. A cavity opening has a diameter less than a minimum cavity-width of the at least one cavity-width.
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