Scanning mechanism and scanning probe microscope

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United States of America Patent

PATENT NO 9625491
SERIAL NO

14614550

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Importance

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Abstract

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A scanning mechanism includes a movable portion to which a scanning target object is attached, and an X-Y actuator to scan the movable portion in an X direction and a Y direction perpendicular to the X direction. The X-Y actuator is symmetrical with respect to a straight line parallel to the Y direction and asymmetrical with respect to a straight line parallel to the X direction.

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Patent Owner(s)

Patent OwnerAddress
OLYMPUS CORPORATION2951 ISHIKAWA-MACHI HACHIOJI-SHI TOKYO 192-8507

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sakai, Nobuaki Hachioji, JP 37 174
Uekusa, Yoshitsugu Tachikawa, JP 9 2

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