Shape inspection device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Apr 18, 2017
Grant Date -
Feb 25, 2016
app pub date -
Mar 20, 2014
filing date -
Apr 8, 2013
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A raised and depressed plate has a base surface, a raised surface, and a depressed surface. A mask processing section is configured to use mask data in which a given region and the remaining region in each of the base surface, the raised surface and the depressed surface are defined as a valid region and an invalid region, respectively, to extract measurement data of the valid regions from measurement data obtained from the sidewall surface of the master disk. A master data generation section is configured to generate master data representing a surface shape of the master disk, by using the measurement data of the valid regions. A user can check measurement accuracy of a shape inspection device by comparing shape values of the raised and depressed plate with the master data.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully