High pulse repetition rate gas discharge laser

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United States of America Patent

PATENT NO 9620920
SERIAL NO

12590307

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Abstract

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A pulsed gas discharge laser operating at an output laser pulse repetition rate of greater than 4 kHz and a method of operating same is disclosed which may comprise a high voltage electrode having a longitudinal extent; a main insulator electrically insulating the high voltage electrode from a grounded gas discharge chamber; a preionizer longitudinally extending along at least a portion of the longitudinal extent of the high voltage electrode; a preionization shim integral with the electrode extending toward the preionizer. The preionizer may be formed integrally with the main insulator. The preionization shim may substantially cover the gap between the electrode and the preionizer. The apparatus and method may comprise an aerodynamic fairing attached to the high voltage electrode to present an aerodynamically smooth surface to the gas flow.

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Patent Owner(s)

Patent OwnerAddress
CYMER LLCCALIFORNIA USA CALIFORNIA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gillespie, Walter D Poway, US 39 3229
Partlo, William N Poway, US 183 6942
Steiger, Thomas D San Diego, US 21 170
Ujazdowski, Richard C Poway, US 43 1432

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