Method for analyzing an object and charged particle beam device for carrying out the method
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United States of America Patent
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Apr 11, 2017
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N/A
app pub date -
Nov 19, 2015
filing date -
Nov 19, 2015
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Abstract
The system described herein relates to analyzing an object using a charged particle beam device generating a beam of charged particles and to the charged particle beam device for analyzing the object. A part of an image of the object corresponding to a volume unit surface of a volume unit is segmented into an area having a first color level and a second color level as well corresponding area fractions are determined. A plurality of particles with color levels are identified by comparing the color levels with the information stored in a database. By comparing the color levels, it is possible to identify the potential particles, for example minerals, which may be included in the volume unit.
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