Large area imprint lithography
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United States of America Patent
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Apr 11, 2017
Grant Date -
Aug 22, 2013
app pub date -
Feb 21, 2013
filing date -
Feb 22, 2012
priority date (Note) -
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Abstract
Methods and systems are provided for patterning polymerizable material dispensed on flexible substrates or flat substrates using imprint lithography techniques. Template replication methods and systems are also presented where patterns from a master are transferred to flexible substrates to form flexible film templates. Such flexible film templates are then used to pattern large area flat substrates. Contact between the imprint template and substrate can be initiated and propagated by relative translation between the template and the substrate.
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