Method and composition for electrodeposition of copper in microelectronics with dipyridyl-based levelers

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United States of America Patent

PATENT NO 9613858
SERIAL NO

14325601

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Abstract

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A method and composition for metallizing a via feature in a semiconductor integrated circuit device substrate, using a leveler compound which is a dipyridyl compound.

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CITIBANK N A388 GREENWICH STREET NEW YORK NY 10013

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Qingyun Branford, US 39 269
Hurtubise, Richard Clinton, US 35 310
Lin, Xuan Watervliet, US 36 416
Paneccasio,, Jr Vincent Madison, US 25 150

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